The Spaniard had taken the first set before the rain arrived on Friday night, meaning both remaining last-eight showdowns were held over until Saturday morning local time.
The Romanian, who beat Frenchwoman Caroline Garcia 6-4 6-2 earlier on Saturday, showed some life in the sixth game of the second set when she fought off a match point and earned her only break but Svitolina quickly shut down any chance of a comeback. Her ranking has plummeted to No. 934 due to her extended absence. "So it was tough for me to close it and I think it's tough to play someone like (that)". The updated Rogers Cup schedule is available at the tournament's official website.
Later Thursday, fifth-seeded Ukrainian Elina Svitolina defeated American Venus Williams 6-2, 6-1, and Spain's Garbine Muguruza dispatched Australian qualifier Ashleigh Barty 6-0, 3-6, 6-2.
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Wozniacki found her rhythm and managed to continually apply pressure, winning 81 per cent of points on her first serve in the second.
"It has been a really great year", Wozniacki said after improving to 46-15 on the season. "I didn't expect this type of day but I'm very happy that I could stay very focused".
Stephens, who is trying to regain her form after missing nearly a year due to a foot injury, showed flashes of her impressive power game, but she had 41 unforced errors, compared to 11 for Wozniacki. The 27-year-old won the Rogers Cup in 2010 at Montreal, one of 25 career titles. Even with her semifinal match being quick and painless, it's not easy to bounce back after playing four sets in one day.
Also, Caroline Garcia of France advanced with a 6-4, 6-2 win over American CiCi Bellis, and Lucie Safarova of the Czech Republic moved on with a 6-3, 6-7 (3), 6-2 victory over Ekaterina Makarova of Russian Federation.
"Today, I was very focused and I learned a lot from that experience, which of course was very painful". "To be in this final once again, it really feels fantastic and I feel like I have been playing really good tennis".